Nano particle discriminating apparatus

ナノ粒子の分別装置

Abstract

【課題】一つの材料から得られた異なる粒径のナノ粒子を分別して捕集することができるナノ粒子の分別装置を提供する。 【解決手段】ナノ粒子分別装置1は、直列的に並べられて互いに隔壁5で仕切られた複数の室9と、蒸発されるべき材料4が配設された生成室2と、前記材料4から生成されたナノ粒子8a〜8cを成膜するための基板7が配設された複数の成膜室3a〜3cと、隣り合う前記複数の室9を互いに連通するために前記隔壁5をそれぞれ貫通して設けられた複数の連通管6と、前記生成室2に連通して冷却ガスを導入するためのガス導入管10と、前記複数の室9のうち、前記生成室2から最も遠い位置に配された室9であり且つ前記成膜室3cである高真空室13に連通して真空引きするための真空配管14とを備えている。 【選択図】図1
PROBLEM TO BE SOLVED: To provide a nano particle discriminating apparatus which can discriminate and collect a nano particle which has a different diameter and is obtained from one material.SOLUTION: A nano particle discriminating apparatus 1 includes: multiple rooms 9 arranged in series and separated each other by a partition wall 5; a generation room 2 in which material 4 to be evaporated is disposed; multiple deposition rooms 3a-3c in which a substrate 7 is disposed, to which nao particles 8a-8c generated from the material 4 are deposited; multiple communication pipes 6 disposed by penetrating through each of the partition wall 5 to communicate with adjacent multiple rooms 9 each other; a gas introduction pipe 10 which communicates with the generation room 2 to introduce cooling gas; and a vacuum piping 14 which communicates with a high vacuum room 13 which is the room 9 disposed at the farthest position from the generation room 2 among the multiple rooms 9, and is the deposition room 3c for vacuum drawing.

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